Simulation of MEMs piezoelectric energy harvester

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...

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Main Authors:	Md Ralib, Aliza Aini, Nordin, Anis Nurashikin, Salleh, Hanim
Format:	Conference or Workshop Item
Language:	English
Published:	2010
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf

id	iium-15698
recordtype	eprints
spelling	iium-156982012-01-12T05:02:05Z http://irep.iium.edu.my/15698/ Simulation of MEMs piezoelectric energy harvester Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions. 2010 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf Md Ralib, Aliza Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of MEMs piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim Simulation of MEMs piezoelectric energy harvester
description	The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions.
format	Conference or Workshop Item
author	Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim
author_facet	Md Ralib, Aliza Aini Nordin, Anis Nurashikin Salleh, Hanim
author_sort	Md Ralib, Aliza Aini
title	Simulation of MEMs piezoelectric energy harvester
title_short	Simulation of MEMs piezoelectric energy harvester
title_full	Simulation of MEMs piezoelectric energy harvester
title_fullStr	Simulation of MEMs piezoelectric energy harvester
title_full_unstemmed	Simulation of MEMs piezoelectric energy harvester
title_sort	simulation of mems piezoelectric energy harvester
publishDate	2010
url	http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/ http://irep.iium.edu.my/15698/1/Simulation_of_a_MEMs_piezoelectric_energy_harvester.pdf
first_indexed	2023-09-18T20:24:35Z
last_indexed	2023-09-18T20:24:35Z
_version_	1777408331845992448

Simulation of MEMs piezoelectric energy harvester

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