Development of a low cost lapping process
Conventional process of producing silicon based products uses large work-piece and it is difficult to attain high flatness of the finished surface. Thus it is not unusual to find it difficult to fine finish small area of planar surfaces and attain high degree of flatness on the finished surfaces. Th...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2009
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/17035/ http://irep.iium.edu.my/17035/ http://irep.iium.edu.my/17035/1/Paper_ID770.pdf |