High speed end milling of silicon using diamond coated tools with air blowing

A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can no...

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Main Authors: Amin, A. K. M. Nurul, Khalid, Noor Syairah, Mohd. Nasir, Siti Nurshahida
Format: Conference or Workshop Item
Language:English
English
Published: 2011
Subjects:
Online Access:http://irep.iium.edu.my/17563/
http://irep.iium.edu.my/17563/
http://irep.iium.edu.my/17563/1/amin_04_Poster_by_Outside_Company.pdf
http://irep.iium.edu.my/17563/4/itex.pdf
id iium-17563
recordtype eprints
spelling iium-175632014-06-04T13:17:53Z http://irep.iium.edu.my/17563/ High speed end milling of silicon using diamond coated tools with air blowing Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd. Nasir, Siti Nurshahida TJ Mechanical engineering and machinery A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can not be removed by mechanical means once they are deposited on the surface. This method has been successful in achieving full ductile mode machining of single crystal silicon with practically no deposition of chips on the surface which has resulted in very low (0.10 μm) surface roughness values. An optimum air blowing pressure and combination of spindle speed, feed and depth of cut has been identified to achieve minimum value of surface roughness and defect free machined surface. This is an economical alternative to conventional mode of machining silicon using time consuming processes of grinding and polishing. Chemical etching can also be avoided since cutting is conducted in full ductile mode resulting in further reduction of processing time and cost. 2011 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/17563/1/amin_04_Poster_by_Outside_Company.pdf application/pdf en http://irep.iium.edu.my/17563/4/itex.pdf Amin, A. K. M. Nurul and Khalid, Noor Syairah and Mohd. Nasir, Siti Nurshahida (2011) High speed end milling of silicon using diamond coated tools with air blowing. In: Invention, Innovation and Technology Exhibition (ITEX) 2011, 20-22 May 2011, Kuala Lumpur, Malaysia. http://www.minds.org.my/cms/index.php?option=com_content&task=view&id=159&Itemid=1
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
English
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Amin, A. K. M. Nurul
Khalid, Noor Syairah
Mohd. Nasir, Siti Nurshahida
High speed end milling of silicon using diamond coated tools with air blowing
description A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can not be removed by mechanical means once they are deposited on the surface. This method has been successful in achieving full ductile mode machining of single crystal silicon with practically no deposition of chips on the surface which has resulted in very low (0.10 μm) surface roughness values. An optimum air blowing pressure and combination of spindle speed, feed and depth of cut has been identified to achieve minimum value of surface roughness and defect free machined surface. This is an economical alternative to conventional mode of machining silicon using time consuming processes of grinding and polishing. Chemical etching can also be avoided since cutting is conducted in full ductile mode resulting in further reduction of processing time and cost.
format Conference or Workshop Item
author Amin, A. K. M. Nurul
Khalid, Noor Syairah
Mohd. Nasir, Siti Nurshahida
author_facet Amin, A. K. M. Nurul
Khalid, Noor Syairah
Mohd. Nasir, Siti Nurshahida
author_sort Amin, A. K. M. Nurul
title High speed end milling of silicon using diamond coated tools with air blowing
title_short High speed end milling of silicon using diamond coated tools with air blowing
title_full High speed end milling of silicon using diamond coated tools with air blowing
title_fullStr High speed end milling of silicon using diamond coated tools with air blowing
title_full_unstemmed High speed end milling of silicon using diamond coated tools with air blowing
title_sort high speed end milling of silicon using diamond coated tools with air blowing
publishDate 2011
url http://irep.iium.edu.my/17563/
http://irep.iium.edu.my/17563/
http://irep.iium.edu.my/17563/1/amin_04_Poster_by_Outside_Company.pdf
http://irep.iium.edu.my/17563/4/itex.pdf
first_indexed 2023-09-18T20:26:29Z
last_indexed 2023-09-18T20:26:29Z
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