High speed end milling of single crystal silicon wafer
Presently, silicon is the most important semiconducting material used in the electronic industry. Silicon has also found application in energy and mechanical application such as electro-optics and micro-electro mechanical system (MEMS) devices. The process of machining silicon requires high quality...
| Main Authors: | , |
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| Format: | Book |
| Language: | English |
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LAP Lambert Academic Publishing
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/17634/ http://irep.iium.edu.my/17634/ http://irep.iium.edu.my/17634/1/Silicon_Machining.pdf |