High speed end milling of silicon using diamond coated tools with air blowing

A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can no...

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Main Authors:	Amin, A. K. M. Nurul, Khalid, Noor Syairah, Mohd. Nasir, Siti Nurshahida
Format:	Conference or Workshop Item
Language:	English
Published:	2011
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/17684/ http://irep.iium.edu.my/17684/ http://irep.iium.edu.my/17684/1/Poster_on_high_speed_end_milling_of_silicon_using_diamond_coated_tools_with_air_blowing_%28final%29.pdf

id	iium-17684
recordtype	eprints
spelling	iium-176842012-02-10T07:34:06Z http://irep.iium.edu.my/17684/ High speed end milling of silicon using diamond coated tools with air blowing Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd. Nasir, Siti Nurshahida TJ Mechanical engineering and machinery A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can not be removed by mechanical means once they are deposited on the surface. This method has been successful in achieving full ductile mode machining of single crystal silicon with practically no deposition of chips on the surface which has resulted in very low (0.10 μm) surface roughness values. An optimum air blowing pressure and combination of spindle speed, feed and depth of cut has been identified to achieve minimum value of surface roughness and defect free machined surface. This is an economical alternative to conventional mode of machining silicon using time consuming processes of grinding and polishing. Chemical etching can also be avoided since cutting is conducted in full ductile mode resulting in further reduction of processing time and cost. 2011 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/17684/1/Poster_on_high_speed_end_milling_of_silicon_using_diamond_coated_tools_with_air_blowing_%28final%29.pdf Amin, A. K. M. Nurul and Khalid, Noor Syairah and Mohd. Nasir, Siti Nurshahida (2011) High speed end milling of silicon using diamond coated tools with air blowing. In: IIUM Research, Invention and Innovation Exhibition 2011 (IRIIE 2011), 9-10 February 2011, Kuala Lumpur, Malaysia. http://www.iium.edu.my/irie/11
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd. Nasir, Siti Nurshahida High speed end milling of silicon using diamond coated tools with air blowing
description	A new method of ductile mode machining of silicon using high speed end milling with diamond coated tool and assisted by compresses air blowing has been developed. This method is capable of removing the ductile and gummy chips before they get deposited on the machined surface since gummy chips can not be removed by mechanical means once they are deposited on the surface. This method has been successful in achieving full ductile mode machining of single crystal silicon with practically no deposition of chips on the surface which has resulted in very low (0.10 μm) surface roughness values. An optimum air blowing pressure and combination of spindle speed, feed and depth of cut has been identified to achieve minimum value of surface roughness and defect free machined surface. This is an economical alternative to conventional mode of machining silicon using time consuming processes of grinding and polishing. Chemical etching can also be avoided since cutting is conducted in full ductile mode resulting in further reduction of processing time and cost.
format	Conference or Workshop Item
author	Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd. Nasir, Siti Nurshahida
author_facet	Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd. Nasir, Siti Nurshahida
author_sort	Amin, A. K. M. Nurul
title	High speed end milling of silicon using diamond coated tools with air blowing
title_short	High speed end milling of silicon using diamond coated tools with air blowing
title_full	High speed end milling of silicon using diamond coated tools with air blowing
title_fullStr	High speed end milling of silicon using diamond coated tools with air blowing
title_full_unstemmed	High speed end milling of silicon using diamond coated tools with air blowing
title_sort	high speed end milling of silicon using diamond coated tools with air blowing
publishDate	2011
url	http://irep.iium.edu.my/17684/ http://irep.iium.edu.my/17684/ http://irep.iium.edu.my/17684/1/Poster_on_high_speed_end_milling_of_silicon_using_diamond_coated_tools_with_air_blowing_%28final%29.pdf
first_indexed	2023-09-18T20:26:40Z
last_indexed	2023-09-18T20:26:40Z
_version_	1777408462957838336

High speed end milling of silicon using diamond coated tools with air blowing

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