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Electrical property of ITO thin film deposited by Rf Magnetron Sputtering

Electrical property of ITO thin film deposited by Rf Magnetron Sputtering

Bibliographic Details
Main Authors: Sutjipto, Agus Geter Edy, Mohd Fuad, Nurul Hajar, -, Farah Diana
Format: Book Chapter
Language:English
Published: IIUM Press 2011
Subjects:
TP Chemical technology
Online Access:http://irep.iium.edu.my/19092/
http://irep.iium.edu.my/19092/
http://irep.iium.edu.my/19092/4/Chapter_9.pdf
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