Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
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Language: | English |
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IIUM Press
2011
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Online Access: | http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/4/Chapter_9.pdf |
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iium-190922012-11-06T13:38:08Z http://irep.iium.edu.my/19092/ Electrical property of ITO thin film deposited by Rf Magnetron Sputtering Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana TP Chemical technology IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19092/4/Chapter_9.pdf Sutjipto, Agus Geter Edy and Mohd Fuad, Nurul Hajar and -, Farah Diana (2011) Electrical property of ITO thin film deposited by Rf Magnetron Sputtering. In: Advances in materials engineering - volume 2. IIUM Press, Kuala Lumpur, pp. 49-54. ISBN 9789674181680 http://rms.research.iium.edu.my/bookstore/default.aspx |
repository_type |
Digital Repository |
institution_category |
Local University |
institution |
International Islamic University Malaysia |
building |
IIUM Repository |
collection |
Online Access |
language |
English |
topic |
TP Chemical technology |
spellingShingle |
TP Chemical technology Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
format |
Book Chapter |
author |
Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana |
author_facet |
Sutjipto, Agus Geter Edy Mohd Fuad, Nurul Hajar -, Farah Diana |
author_sort |
Sutjipto, Agus Geter Edy |
title |
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
title_short |
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
title_full |
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
title_fullStr |
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
title_full_unstemmed |
Electrical property of ITO thin film deposited by Rf Magnetron Sputtering |
title_sort |
electrical property of ito thin film deposited by rf magnetron sputtering |
publisher |
IIUM Press |
publishDate |
2011 |
url |
http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/ http://irep.iium.edu.my/19092/4/Chapter_9.pdf |
first_indexed |
2023-09-18T20:28:29Z |
last_indexed |
2023-09-18T20:28:29Z |
_version_ |
1777408576485064704 |