Micro-hotplate based temperature stabilization system for CMOS SAW resonators

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon h...

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Main Authors:	Nordin, Anis Nurashikin, Voiculescu, Ioana, Zaghloul, Mona E.
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2009
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/2/Microsystems2009.pdf

id	iium-1939
recordtype	eprints
spelling	iium-19392011-09-13T03:43:56Z http://irep.iium.edu.my/1939/ Micro-hotplate based temperature stabilization system for CMOS SAW resonators Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. TK7885 Computer engineering Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon heaters. The first approach employs the oven control temperature stabilization scheme. Using this approach, the device’s temperature is elevated using on-chip heaters to Tmax = 42°C to maintain constant device temperature. Both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/°C has been reduced to -23.19 ppm/°C when heated to 42°C. The second scheme uses a feedback control circuit to switch the onchip heaters on and off depending on the ambient temperature. This method provided reduction of the TCF from -165.38 ppm/°C, to -93.33 ppm/°C. Comparison of both methods was also provided. Springer Berlin / Heidelberg 2009 Article PeerReviewed application/pdf en http://irep.iium.edu.my/1939/2/Microsystems2009.pdf Nordin, Anis Nurashikin and Voiculescu, Ioana and Zaghloul, Mona E. (2009) Micro-hotplate based temperature stabilization system for CMOS SAW resonators. Microsystems Technologies, 15 (8). pp. 1187-1193. ISSN 0946-7076 (Print), 1432-1858 (Online) http://www.springerlink.com/content/cv523534175363p2/about/ 10.1007/s00542-009-07865
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E. Micro-hotplate based temperature stabilization system for CMOS SAW resonators
description	Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents two methods of temperature control for CMOS SAW resonators using embedded polysilicon heaters. The first approach employs the oven control temperature stabilization scheme. Using this approach, the device’s temperature is elevated using on-chip heaters to Tmax = 42°C to maintain constant device temperature. Both DC and RF measurements of the heater together with the resonator were conducted. Experimental results have indicated that the TCF of the CMOS SAW resonator of -97.2 ppm/°C has been reduced to -23.19 ppm/°C when heated to 42°C. The second scheme uses a feedback control circuit to switch the onchip heaters on and off depending on the ambient temperature. This method provided reduction of the TCF from -165.38 ppm/°C, to -93.33 ppm/°C. Comparison of both methods was also provided.
format	Article
author	Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E.
author_facet	Nordin, Anis Nurashikin Voiculescu, Ioana Zaghloul, Mona E.
author_sort	Nordin, Anis Nurashikin
title	Micro-hotplate based temperature stabilization system for CMOS SAW resonators
title_short	Micro-hotplate based temperature stabilization system for CMOS SAW resonators
title_full	Micro-hotplate based temperature stabilization system for CMOS SAW resonators
title_fullStr	Micro-hotplate based temperature stabilization system for CMOS SAW resonators
title_full_unstemmed	Micro-hotplate based temperature stabilization system for CMOS SAW resonators
title_sort	micro-hotplate based temperature stabilization system for cmos saw resonators
publisher	Springer Berlin / Heidelberg
publishDate	2009
url	http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/ http://irep.iium.edu.my/1939/2/Microsystems2009.pdf
first_indexed	2023-09-18T20:09:29Z
last_indexed	2023-09-18T20:09:29Z
_version_	1777407381103181824

Micro-hotplate based temperature stabilization system for CMOS SAW resonators

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