Focused ion beam micromachining: technology and application
Main Authors: | , , , |
---|---|
Format: | Book Chapter |
Language: | English |
Published: |
IIUM Press
2011
|
Subjects: | |
Online Access: | http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf |
id |
iium-19415 |
---|---|
recordtype |
eprints |
spelling |
iium-194152012-09-24T09:13:16Z http://irep.iium.edu.my/19415/ Focused ion beam micromachining: technology and application Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali NA Architecture IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19415/4/Chapter_15.pdf Jaafar, Israd Hakim and Abdul Rahman, Nur Atiqah and Banu, Asfana and Mohammad , Yeakub Ali (2011) Focused ion beam micromachining: technology and application. In: Advanced Machining Process. IIUM Press, Kuala Lumpur, pp. 77-82. ISBN 9789674181628 http://rms.research.iium.edu.my/bookstore/default.aspx |
repository_type |
Digital Repository |
institution_category |
Local University |
institution |
International Islamic University Malaysia |
building |
IIUM Repository |
collection |
Online Access |
language |
English |
topic |
NA Architecture |
spellingShingle |
NA Architecture Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali Focused ion beam micromachining: technology and application |
format |
Book Chapter |
author |
Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali |
author_facet |
Jaafar, Israd Hakim Abdul Rahman, Nur Atiqah Banu, Asfana Mohammad , Yeakub Ali |
author_sort |
Jaafar, Israd Hakim |
title |
Focused ion beam micromachining: technology and application |
title_short |
Focused ion beam micromachining: technology and application |
title_full |
Focused ion beam micromachining: technology and application |
title_fullStr |
Focused ion beam micromachining: technology and application |
title_full_unstemmed |
Focused ion beam micromachining: technology and application |
title_sort |
focused ion beam micromachining: technology and application |
publisher |
IIUM Press |
publishDate |
2011 |
url |
http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/ http://irep.iium.edu.my/19415/4/Chapter_15.pdf |
first_indexed |
2023-09-18T20:28:59Z |
last_indexed |
2023-09-18T20:28:59Z |
_version_ |
1777408608840974336 |