Design and modeling of silicon MEMS accelerometer

Design and modeling of silicon MEMS accelerometer

In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...

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Main Authors: Hrairi, Meftah, Baharom, Badrul Hanafi
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/2052/
http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf
id iium-2052
recordtype eprints
spelling iium-20522012-02-29T03:12:28Z http://irep.iium.edu.my/2052/ Design and modeling of silicon MEMS accelerometer Hrairi, Meftah Baharom, Badrul Hanafi TJ Mechanical engineering and machinery TS Manufactures In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications. 2011-05 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf Hrairi, Meftah and Baharom, Badrul Hanafi (2011) Design and modeling of silicon MEMS accelerometer. In: International Conference on Mechanical, Automotive and Aerospace Engineering, ICMAAE’11, 17 - 19 May, 2011, Kuala Lumpur.
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Hrairi, Meftah
Baharom, Badrul Hanafi
Design and modeling of silicon MEMS accelerometer
description In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.
format Conference or Workshop Item
author Hrairi, Meftah
Baharom, Badrul Hanafi
author_facet Hrairi, Meftah
Baharom, Badrul Hanafi
author_sort Hrairi, Meftah
title Design and modeling of silicon MEMS accelerometer
title_short Design and modeling of silicon MEMS accelerometer
title_full Design and modeling of silicon MEMS accelerometer
title_fullStr Design and modeling of silicon MEMS accelerometer
title_full_unstemmed Design and modeling of silicon MEMS accelerometer
title_sort design and modeling of silicon mems accelerometer
publishDate 2011
url http://irep.iium.edu.my/2052/
http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf
first_indexed 2023-09-18T20:09:35Z
last_indexed 2023-09-18T20:09:35Z
_version_ 1777407387391492096

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