Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon

Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon

Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittlene...

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Main Authors: Amin, A. K. M. Nurul, Patwari, Muhammed Anayet Ullah, M., Dali, M.I., Musa
Format: Conference or Workshop Item
Language:English
Published: 2010
Subjects:
TP Chemical technology
Online Access:http://irep.iium.edu.my/23056/
http://irep.iium.edu.my/23056/
http://irep.iium.edu.my/23056/1/p130.pdf
id iium-23056
recordtype eprints
spelling iium-230562013-06-18T04:28:02Z http://irep.iium.edu.my/23056/ Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon Amin, A. K. M. Nurul Patwari, Muhammed Anayet Ullah M., Dali M.I., Musa TP Chemical technology Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity... 2010 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/23056/1/p130.pdf Amin, A. K. M. Nurul and Patwari, Muhammed Anayet Ullah and M., Dali and M.I., Musa (2010) Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon. In: IIUM Research, Innovation & Invention Exhibition (IRIIE 2010), 26 - 27 January 2010, Kuala Lumpur. http://www.iium.edu.my/irie/10/sub10/author/list_p.php
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TP Chemical technology
spellingShingle TP Chemical technology
Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
description Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity...
format Conference or Workshop Item
author Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
author_facet Amin, A. K. M. Nurul
Patwari, Muhammed Anayet Ullah
M., Dali
M.I., Musa
author_sort Amin, A. K. M. Nurul
title Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_short Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_full Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_fullStr Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_full_unstemmed Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
title_sort development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
publishDate 2010
url http://irep.iium.edu.my/23056/
http://irep.iium.edu.my/23056/
http://irep.iium.edu.my/23056/1/p130.pdf
first_indexed 2023-09-18T20:34:57Z
last_indexed 2023-09-18T20:34:57Z
_version_ 1777408983319969792

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