Implementation of high speed of silicon using diamond coated tools with air blowing
Ductile mode machining of silicon is hard to obtain due to the brittleness of silicon and hardness of tool materials. A brittle material will have little tendency to deform before it fractures when it is subjected to stress. Ceramic materials such as silicon carbide and silicon nitride are hard a...
| Main Authors: | , , |
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/23609/ http://irep.iium.edu.my/23609/ http://irep.iium.edu.my/23609/4/chp30.pdf |