MEMS capacitive ultrasonic transducers
Main Author: | |
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Format: | Book Chapter |
Language: | English |
Published: |
IIUM Press
2011
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Subjects: | |
Online Access: | http://irep.iium.edu.my/24097/ http://irep.iium.edu.my/24097/ http://irep.iium.edu.my/24097/1/chp5.pdf |