A review of focused ion beam sputtering

This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical...

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Main Authors:	Ali, Mohammad Yeakub, Hung, Wayne N.P., Fu, Yongqi
Format:	Article
Language:	English
Published:	Springer 2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/1/IJPEM_2010_11_%281%29_157-170.pdf

id	iium-2424
recordtype	eprints
spelling	iium-24242011-10-19T08:12:48Z http://irep.iium.edu.my/2424/ A review of focused ion beam sputtering Ali, Mohammad Yeakub Hung, Wayne N.P. Fu, Yongqi TJ Mechanical engineering and machinery TS Manufactures This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical models were more useful for application compared to fundamental models. Fabrication of various micro and nano structures was discussed. Trimmed atomic force microscope (AFM) tips were tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used to machine microchannels. Slicing and dwell time control approaches on FIB sputtering were presented for the fabrication of three dimensional microcavities. The first approach is preferred for practical applications. The maximum aspect ratio of 13:1 of the microstructures was achieved. The minimum size of the nanopore was in the range of 2-10 μm. Cavities of microgear of 70 μm outside diameter were sputtered with submicrometer accuracy and 2-5 nm average surface roughness. The microcavities were then filled with polymer in a subsequent micromodling process. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed. Springer 2010-02 Article PeerReviewed application/pdf en http://irep.iium.edu.my/2424/1/IJPEM_2010_11_%281%29_157-170.pdf Ali, Mohammad Yeakub and Hung, Wayne N.P. and Fu, Yongqi (2010) A review of focused ion beam sputtering. International Journal of Precision Engineering and Manufacturing, 11 (1). pp. 157-170. ISSN 2005-4602 (O), 1229-8557 (P), http://www.springerlink.com/content/uvg16626242333tu/ 10.1007/s12541-010-0019-y
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Hung, Wayne N.P. Fu, Yongqi A review of focused ion beam sputtering
description	This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical models were more useful for application compared to fundamental models. Fabrication of various micro and nano structures was discussed. Trimmed atomic force microscope (AFM) tips were tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used to machine microchannels. Slicing and dwell time control approaches on FIB sputtering were presented for the fabrication of three dimensional microcavities. The first approach is preferred for practical applications. The maximum aspect ratio of 13:1 of the microstructures was achieved. The minimum size of the nanopore was in the range of 2-10 μm. Cavities of microgear of 70 μm outside diameter were sputtered with submicrometer accuracy and 2-5 nm average surface roughness. The microcavities were then filled with polymer in a subsequent micromodling process. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed.
format	Article
author	Ali, Mohammad Yeakub Hung, Wayne N.P. Fu, Yongqi
author_facet	Ali, Mohammad Yeakub Hung, Wayne N.P. Fu, Yongqi
author_sort	Ali, Mohammad Yeakub
title	A review of focused ion beam sputtering
title_short	A review of focused ion beam sputtering
title_full	A review of focused ion beam sputtering
title_fullStr	A review of focused ion beam sputtering
title_full_unstemmed	A review of focused ion beam sputtering
title_sort	review of focused ion beam sputtering
publisher	Springer
publishDate	2010
url	http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/ http://irep.iium.edu.my/2424/1/IJPEM_2010_11_%281%29_157-170.pdf
first_indexed	2023-09-18T20:10:01Z
last_indexed	2023-09-18T20:10:01Z
_version_	1777407415125278720

A review of focused ion beam sputtering

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