Fabrication of Bio-MEMS Nanostructure by focused ion beam

Fabrication of Bio-MEMS Nanostructure by focused ion beam

This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to...

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Main Authors: Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
Format: Conference or Workshop Item
Language:English
Published: 2010
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/2433/
http://irep.iium.edu.my/2433/
http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf
id iium-2433
recordtype eprints
spelling iium-24332011-12-06T06:04:32Z http://irep.iium.edu.my/2433/ Fabrication of Bio-MEMS Nanostructure by focused ion beam Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar TJ Mechanical engineering and machinery TS Manufactures This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra. The optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6 μm. By using these process parameters, microfeatures such as microholes, micro/nano pillars and etc. were fabricated. 2010 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf Ali, Mohammad Yeakub and Mohd Fuad, Nurul Hajar (2010) Fabrication of Bio-MEMS Nanostructure by focused ion beam. In: International Conference on the Advancement of Materials and Nanotechnology, 29 Nov-1 Dec 2010, Prince Hotel, Kuala Lumpur. http://www.uitm.edu.my/index.php/en/upcoming-events/263-icamn-ii-2010
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Mohd Fuad, Nurul Hajar
Fabrication of Bio-MEMS Nanostructure by focused ion beam
description This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum Ra. The optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6 μm. By using these process parameters, microfeatures such as microholes, micro/nano pillars and etc. were fabricated.
format Conference or Workshop Item
author Ali, Mohammad Yeakub
Mohd Fuad, Nurul Hajar
author_facet Ali, Mohammad Yeakub
Mohd Fuad, Nurul Hajar
author_sort Ali, Mohammad Yeakub
title Fabrication of Bio-MEMS Nanostructure by focused ion beam
title_short Fabrication of Bio-MEMS Nanostructure by focused ion beam
title_full Fabrication of Bio-MEMS Nanostructure by focused ion beam
title_fullStr Fabrication of Bio-MEMS Nanostructure by focused ion beam
title_full_unstemmed Fabrication of Bio-MEMS Nanostructure by focused ion beam
title_sort fabrication of bio-mems nanostructure by focused ion beam
publishDate 2010
url http://irep.iium.edu.my/2433/
http://irep.iium.edu.my/2433/
http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf
first_indexed 2023-09-18T20:10:01Z
last_indexed 2023-09-18T20:10:01Z
_version_ 1777407415541563392

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