Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish

This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...

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Main Authors:	Ali, Mohammad Yeakub, Mohd Fuad, Nurul Hajar
Other Authors:	Adesta, Erry Yulian Triblas
Format:	Conference or Workshop Item
Language:	English
Published:	Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM 2010
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2505/ http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf

id	iium-2505
recordtype	eprints
spelling	iium-25052012-01-31T07:51:22Z http://irep.iium.edu.my/2505/ Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar TJ Mechanical engineering and machinery TS Manufactures This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopillars ranges from 1 to 5.5 μm with aspect ratio of 1-6. Empirical relationship of taper angle, aspect ratio and height of the nanopillar were established. Taper angle was found to be reduced as the height of the nanopillar increased. The taper angle of nanopillars depends on the acceleration voltage, probe current and dwell time. Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM Adesta, Erry Yulian Triblas Yaacob, Iskandar Idris Ali, Mohammad Yeakub Maleque, Md. Abdul Mohamed Ariff, Tasnim Firdaus 2010 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf Ali, Mohammad Yeakub and Mohd Fuad, Nurul Hajar (2010) Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish. In: UNSPECIFIED.
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
description	This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopillars ranges from 1 to 5.5 μm with aspect ratio of 1-6. Empirical relationship of taper angle, aspect ratio and height of the nanopillar were established. Taper angle was found to be reduced as the height of the nanopillar increased. The taper angle of nanopillars depends on the acceleration voltage, probe current and dwell time.
author2	Adesta, Erry Yulian Triblas
author_facet	Adesta, Erry Yulian Triblas Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar
format	Conference or Workshop Item
author	Ali, Mohammad Yeakub Mohd Fuad, Nurul Hajar
author_sort	Ali, Mohammad Yeakub
title	Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
title_short	Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
title_full	Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
title_fullStr	Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
title_full_unstemmed	Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish
title_sort	fabrication of silicon nanopillar sheet for cell culture dish
publisher	Department of manufacturing and Materials,Kulliyyah of Engineering, IIUM
publishDate	2010
url	http://irep.iium.edu.my/2505/ http://irep.iium.edu.my/2505/1/RMC_Book_Chapter_Fabrication_Nanopillar.pdf
first_indexed	2023-09-18T20:10:06Z
last_indexed	2023-09-18T20:10:06Z
_version_	1777407420496084992

Fabrication of Silicon Nanopillar Sheet for Cell Culture Dish

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