Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

This paper discusses the microfabrication of micromilling tools using wire electrodischarge grinding (WEDG) and focused ion beam (FIB) sputtering. The tool blank of tungsten carbide was produced by WEDG and the cutting edges were formed by FIB sputtering. Using these two complementary processes...

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Main Authors:	Ali, Mohammad Yeakub, Ong, A. S.
Format:	Article
Language:	English
Published:	Springer 2006
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/27106/ http://irep.iium.edu.my/27106/1/018_IJAMT_31%285-6%29_501-508.pdf

id	iium-27106
recordtype	eprints
spelling	iium-271062013-07-24T01:54:39Z http://irep.iium.edu.my/27106/ Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering Ali, Mohammad Yeakub Ong, A. S. TS Manufactures This paper discusses the microfabrication of micromilling tools using wire electrodischarge grinding (WEDG) and focused ion beam (FIB) sputtering. The tool blank of tungsten carbide was produced by WEDG and the cutting edges were formed by FIB sputtering. Using these two complementary processes micromilling tools were fabricated with submicrometer accuracy and nanometric levelled surface finish. The fabricated microtools were used to mill microchannels on polymer. The fabricated microtool and microchannels were inspected using an optical surface profiler, atomic force microscope (AFM) and scanning electron microscope (SEM). The length of the microchannels ranges from 0.5 mm to 2 mm. The maximum trench depth was 5μm. The widths of the channels were about 10–20% larger than the tool diameter when milling without and with lubrication, respectively. An average surface finish of 80 nm was achieved. Springer 2006 Article PeerReviewed application/pdf en http://irep.iium.edu.my/27106/1/018_IJAMT_31%285-6%29_501-508.pdf Ali, Mohammad Yeakub and Ong, A. S. (2006) Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering. International Journal of Advanced Manufacturing Technology, 31 (5-6). pp. 501-508. ISSN 1433-3015 (O); 0268-3768 (P)
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TS Manufactures
spellingShingle	TS Manufactures Ali, Mohammad Yeakub Ong, A. S. Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
description	This paper discusses the microfabrication of micromilling tools using wire electrodischarge grinding (WEDG) and focused ion beam (FIB) sputtering. The tool blank of tungsten carbide was produced by WEDG and the cutting edges were formed by FIB sputtering. Using these two complementary processes micromilling tools were fabricated with submicrometer accuracy and nanometric levelled surface finish. The fabricated microtools were used to mill microchannels on polymer. The fabricated microtool and microchannels were inspected using an optical surface profiler, atomic force microscope (AFM) and scanning electron microscope (SEM). The length of the microchannels ranges from 0.5 mm to 2 mm. The maximum trench depth was 5μm. The widths of the channels were about 10–20% larger than the tool diameter when milling without and with lubrication, respectively. An average surface finish of 80 nm was achieved.
format	Article
author	Ali, Mohammad Yeakub Ong, A. S.
author_facet	Ali, Mohammad Yeakub Ong, A. S.
author_sort	Ali, Mohammad Yeakub
title	Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
title_short	Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
title_full	Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
title_fullStr	Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
title_full_unstemmed	Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
title_sort	fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering
publisher	Springer
publishDate	2006
url	http://irep.iium.edu.my/27106/ http://irep.iium.edu.my/27106/1/018_IJAMT_31%285-6%29_501-508.pdf
first_indexed	2023-09-18T20:40:18Z
last_indexed	2023-09-18T20:40:18Z
_version_	1777409320098463744

Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

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