APA (7th ed.) Citation

Ali, M. Y., Hung, N. P., Ngoi, B. K. A., & Yuan, S. (2003). Sidewall surface roughness of Sputtered Silicon 1: Surface modelling. Maney Publishing.

Chicago Style (17th ed.) Citation

Ali, Mohammad Yeakub, N. P. Hung, B. K. A. Ngoi, and S. Yuan. Sidewall Surface Roughness of Sputtered Silicon 1: Surface Modelling. Maney Publishing, 2003.

MLA (8th ed.) Citation

Ali, Mohammad Yeakub, et al. Sidewall Surface Roughness of Sputtered Silicon 1: Surface Modelling. Maney Publishing, 2003.