Sidewall surface roughness of Sputtered Silicon 1: surface modelling
Mathematical models for the calculation of sidewall surface roughness have been developed for focused ion beam (FIB) sputtering. The surface roughness profile at the sidewall was different to the bottom surface profile for the same sputtering parameters and substrate material. The cumulative sp...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Maney Publishing
2003
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27107/ http://irep.iium.edu.my/27107/1/019_SE1_9%282%29_097-103.pdf |