APA (7th ed.) Citation

Hung, N., Fu, Y., & Ali, M. Y. (2002). Focused ion beam machining of silicon. Elsevier BV.

Chicago Style (17th ed.) Citation

Hung, NguyenPhu, Yongqi Fu, and Mohammad Yeakub Ali. Focused Ion Beam Machining of Silicon. Elsevier BV, 2002.

MLA (8th ed.) Citation

Hung, NguyenPhu, et al. Focused Ion Beam Machining of Silicon. Elsevier BV, 2002.