APA (7th ed.) Citation

Hung, N., Ali, M. Y., Fu, Y., Ong, N., & Tay, M. (2001). Surface integrity and removal rate of silicon sputtered with focused ion beam. Taylor and Francis Inc.

Chicago Style (17th ed.) Citation

Hung, NguyenPhu, Mohammad Yeakub Ali, Yongqi Fu, NanShing Ong, and MengLeong Tay. Surface Integrity and Removal Rate of Silicon Sputtered with Focused Ion Beam. Taylor and Francis Inc, 2001.

MLA (8th ed.) Citation

Hung, NguyenPhu, et al. Surface Integrity and Removal Rate of Silicon Sputtered with Focused Ion Beam. Taylor and Francis Inc, 2001.