Focused ion beam micromachining of mems

Focused ion beam micromachining of mems

This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measure...

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Bibliographic Details
Main Author: Ali, Mohammad Yeakub
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/27164/
http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf
id iium-27164
recordtype eprints
spelling iium-271642013-09-05T03:58:17Z http://irep.iium.edu.my/27164/ Focused ion beam micromachining of mems Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used in micromilling with desktop milling machine to machine microchannels. Cavities of hair-sized microgear were sputtered using FIB with submicrometer accuracy and nanometric leveled surface finish. Microcavities were used in microinjection molding for mass production of polymer microcomponents. The overall sizes of these microcomponents were few tens to few hundreds micrometers. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed. These fabricated microcomponents have potential application in biomedical and other microelectromechanical systems. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf Ali, Mohammad Yeakub (2008) Focused ion beam micromachining of mems. In: International Symposium on Advanced Mechatronics Engineering, 29 February 2008, Changwon, S. Korea.
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Focused ion beam micromachining of mems
description This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanical systems) such as optical elements, trimming of atomic force microscope (AFM) tip, nanopillar, micromilling tool, microcavity for replication is discussed. The trimmed AFM tip was tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used in micromilling with desktop milling machine to machine microchannels. Cavities of hair-sized microgear were sputtered using FIB with submicrometer accuracy and nanometric leveled surface finish. Microcavities were used in microinjection molding for mass production of polymer microcomponents. The overall sizes of these microcomponents were few tens to few hundreds micrometers. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed. These fabricated microcomponents have potential application in biomedical and other microelectromechanical systems.
format Conference or Workshop Item
author Ali, Mohammad Yeakub
author_facet Ali, Mohammad Yeakub
author_sort Ali, Mohammad Yeakub
title Focused ion beam micromachining of mems
title_short Focused ion beam micromachining of mems
title_full Focused ion beam micromachining of mems
title_fullStr Focused ion beam micromachining of mems
title_full_unstemmed Focused ion beam micromachining of mems
title_sort focused ion beam micromachining of mems
publishDate 2008
url http://irep.iium.edu.my/27164/
http://irep.iium.edu.my/27164/1/052_ISAME_CUS_SKorea_2008_8-16.pdf
first_indexed 2023-09-18T20:40:23Z
last_indexed 2023-09-18T20:40:23Z
_version_ 1777409325337149440

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