Sputtering of paraboloid microstructure using fib
This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices w...
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| Format: | Conference or Workshop Item |
| Language: | English |
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2006
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| Online Access: | http://irep.iium.edu.my/27177/ http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf |
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iium-27177 |
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eprints |
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iium-271772013-09-04T04:27:47Z http://irep.iium.edu.my/27177/ Sputtering of paraboloid microstructure using fib Ali, Mohammad Yeakub Loo, Y. W. TJ Mechanical engineering and machinery TS Manufactures This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices were 1 μm smaller in diameter compared to the previous layers. The diameters of the biggest and smallest slice were 16 μm and 1 μm respectively. The thickness of each slice was about 0.2 μm. An appropriate amount of ion dose was delivered to sputter the particular thickness for each slice. The slice by slice sputtering command was given by the Micrion DMOD description language (MDDL). Geometry and surface characteristics of microparaboloid structures were investigated by using scanning electron microscope (SEM) and atomic force microscope (AFM). The diameter at the top and depth of the sputtered paraboroid were found to be 16 μm and 3.2 μm respectively. 2006 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf Ali, Mohammad Yeakub and Loo, Y. W. (2006) Sputtering of paraboloid microstructure using fib. In: International Conference on MEMS and Nanotechnology (ICMN'06), 15-16 March 2006 , Kuala Lumpur, Malaysia. |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TJ Mechanical engineering and machinery TS Manufactures |
| spellingShingle |
TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Loo, Y. W. Sputtering of paraboloid microstructure using fib |
| description |
This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices were 1 μm smaller in diameter compared to the previous layers. The diameters of the biggest and smallest slice were 16 μm and 1 μm respectively. The thickness of each slice was about 0.2 μm. An appropriate amount of ion dose was delivered to sputter the particular thickness for each slice. The slice by slice sputtering command was given by the Micrion DMOD description language (MDDL). Geometry and surface characteristics of microparaboloid structures were investigated by using scanning electron microscope (SEM) and atomic force microscope (AFM). The diameter at the top and depth of the sputtered paraboroid were found to be 16 μm and 3.2 μm respectively. |
| format |
Conference or Workshop Item |
| author |
Ali, Mohammad Yeakub Loo, Y. W. |
| author_facet |
Ali, Mohammad Yeakub Loo, Y. W. |
| author_sort |
Ali, Mohammad Yeakub |
| title |
Sputtering of paraboloid microstructure using fib |
| title_short |
Sputtering of paraboloid microstructure using fib |
| title_full |
Sputtering of paraboloid microstructure using fib |
| title_fullStr |
Sputtering of paraboloid microstructure using fib |
| title_full_unstemmed |
Sputtering of paraboloid microstructure using fib |
| title_sort |
sputtering of paraboloid microstructure using fib |
| publishDate |
2006 |
| url |
http://irep.iium.edu.my/27177/ http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf |
| first_indexed |
2023-09-18T20:40:24Z |
| last_indexed |
2023-09-18T20:40:24Z |
| _version_ |
1777409326831370240 |