Sputtering of paraboloid microstructure using fib
This paper describes the fabrication of three dimensional (3D) microstructures using focused ion beam (FIB) sputtering. Paraboloid cavity was chosen as an example for 3D microstructure. This microstructure was considered as the combination of a series of flat circular slices. The successive slices w...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27177/ http://irep.iium.edu.my/27177/1/058_ICMN_2006_13-16.pdf |