Micromilling of tungsten carbide using focused ion beam
This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf |
| Summary: | This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for
the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time,
etc. were investigated in this study. A series of experiments were conducted on tungsten carbide with
varying operating parameters to establish the correlation how the parameters affect the micromilling
process and quality of the final component. All the experiments were carried out with dry micromilling
using serpentine scanning mode. Empirical models were formulated to predict the sputtered depth which
increased with higher ion dose significantly but the relationship was nonlinear. Some of the experimental
results are discussed with qualitative judgement as it was difficult to explain quantitatively. |
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