Fabrication of three dimensional micro-components – A review
Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused io...
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| Format: | Conference or Workshop Item |
| Language: | English |
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2000
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| Online Access: | http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |
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iium-27307 |
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| recordtype |
eprints |
| spelling |
iium-273072013-08-26T08:10:26Z http://irep.iium.edu.my/27307/ Fabrication of three dimensional micro-components – A review Ali, Mohammad Yeakub Hung, Wayne N.P. TJ Mechanical engineering and machinery TS Manufactures Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process. 2000 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf Ali, Mohammad Yeakub and Hung, Wayne N.P. (2000) Fabrication of three dimensional micro-components – A review. In: 6th Annual Paper Meet & International Conference on Mechanical Engineering in the 21st Century , 17-19 February 2000, Dhaka, Bangladesh. |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TJ Mechanical engineering and machinery TS Manufactures |
| spellingShingle |
TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Hung, Wayne N.P. Fabrication of three dimensional micro-components – A review |
| description |
Micro-components have become increasingly important to meet the demand of miniaturization and have a wide variety of applications in the field of micro-electronics, opto-electronics and microelectromechanical systems. Lithography, electron beam machining (EBM), laser beam machining (LBM), focused ion beam (FIB) machining are mostly being used for the machining of two-dimensional (2D) and pseudo three dimensional (3D) micro-components. But it was more difficult to fabricate 3D micro-components with curved surfaces by these processes. In the recent years, LIGA (Lithography, Electroplating and Molding) technique has evolved as a promising method for mass fabrication of 3D micro-components at high expenses and investment. This paper reviews the available fabrication processes for 2D and 3D micro-components. It covers the fundamentals, applications and limitations of each process. |
| format |
Conference or Workshop Item |
| author |
Ali, Mohammad Yeakub Hung, Wayne N.P. |
| author_facet |
Ali, Mohammad Yeakub Hung, Wayne N.P. |
| author_sort |
Ali, Mohammad Yeakub |
| title |
Fabrication of three dimensional micro-components – A review |
| title_short |
Fabrication of three dimensional micro-components – A review |
| title_full |
Fabrication of three dimensional micro-components – A review |
| title_fullStr |
Fabrication of three dimensional micro-components – A review |
| title_full_unstemmed |
Fabrication of three dimensional micro-components – A review |
| title_sort |
fabrication of three dimensional micro-components – a review |
| publishDate |
2000 |
| url |
http://irep.iium.edu.my/27307/ http://irep.iium.edu.my/27307/1/071_6th_APM_IEB_2000_418-427.pdf |
| first_indexed |
2023-09-18T20:40:36Z |
| last_indexed |
2023-09-18T20:40:36Z |
| _version_ |
1777409338930888704 |