ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon
The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating which serves as an alternative to the conventional silicon...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30323/ http://irep.iium.edu.my/30323/ http://irep.iium.edu.my/30323/ http://irep.iium.edu.my/30323/1/Microsystem_Technologies_published_version_APRIL_2013.pdf |