High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy
This work investigates reverse-polarity dry microelectro- discharge machining (μEDM) of pure carbonnanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional μEDM where the material to be machined forms the anode. The new configuration with the reversed polarity...
| Main Author: | |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2012
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30325/ http://irep.iium.edu.my/30325/1/Published.pdf |
| Summary: | This work investigates reverse-polarity dry microelectro-
discharge machining (μEDM) of pure carbonnanotube
(CNT) forests that are used as cathodes in the
process, as opposed to conventional μEDM where the
material to be machined forms the anode. The new
configuration with the reversed polarity is observed to
generate higher discharge currents, most likely due to
effective field-emission from CNTs. This effect allows the
process to be performed at very low discharge energies,
~80× smaller than in the conventional normal-polarity
case, with the machining voltage and tolerance down to
10 V and 2.5 μm, respectively, enabling high-precision
high-aspect-ratio micropatterning in the forests. |
|---|