A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...
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Online Access: | http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf |
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iium-307722013-09-19T08:14:55Z http://irep.iium.edu.my/30772/ A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor Faris, Waleed Fekry Mohammed, Hazem TJ Mechanical engineering and machinery We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods 2004 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf Faris, Waleed Fekry and Mohammed, Hazem (2004) A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor. In: 2004 IEEE International Conference on Semiconductor Electronics, 7-9 December 2004, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1620891&queryText%3DA+comparison+between+two+solution+approaches+for+diaphragmbased+capacitive+pressure+microsensor |
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International Islamic University Malaysia |
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Online Access |
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English |
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TJ Mechanical engineering and machinery |
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TJ Mechanical engineering and machinery Faris, Waleed Fekry Mohammed, Hazem A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
description |
We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods |
format |
Conference or Workshop Item |
author |
Faris, Waleed Fekry Mohammed, Hazem |
author_facet |
Faris, Waleed Fekry Mohammed, Hazem |
author_sort |
Faris, Waleed Fekry |
title |
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
title_short |
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
title_full |
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
title_fullStr |
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
title_full_unstemmed |
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
title_sort |
comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
publishDate |
2004 |
url |
http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf |
first_indexed |
2023-09-18T20:45:00Z |
last_indexed |
2023-09-18T20:45:00Z |
_version_ |
1777409616505733120 |