A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...

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Main Authors: Faris, Waleed Fekry, Mohammed, Hazem
Format: Conference or Workshop Item
Language:English
Published: 2004
Subjects:
TJ Mechanical engineering and machinery
Online Access:http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf
id iium-30772
recordtype eprints
spelling iium-307722013-09-19T08:14:55Z http://irep.iium.edu.my/30772/ A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor Faris, Waleed Fekry Mohammed, Hazem TJ Mechanical engineering and machinery We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods 2004 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf Faris, Waleed Fekry and Mohammed, Hazem (2004) A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor. In: 2004 IEEE International Conference on Semiconductor Electronics, 7-9 December 2004, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1620891&queryText%3DA+comparison+between+two+solution+approaches+for+diaphragmbased+capacitive+pressure+microsensor
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Faris, Waleed Fekry
Mohammed, Hazem
A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
description We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods
format Conference or Workshop Item
author Faris, Waleed Fekry
Mohammed, Hazem
author_facet Faris, Waleed Fekry
Mohammed, Hazem
author_sort Faris, Waleed Fekry
title A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
title_short A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
title_full A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
title_fullStr A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
title_full_unstemmed A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
title_sort comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
publishDate 2004
url http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf
first_indexed 2023-09-18T20:45:00Z
last_indexed 2023-09-18T20:45:00Z
_version_ 1777409616505733120

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