A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...

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Bibliographic Details
Main Authors: Faris, Waleed Fekry, Mohammed, Hazem
Format: Conference or Workshop Item
Language:English
Published: 2004
Subjects:
Online Access:http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/
http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf

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