RF CMOS-MEMS cantilever resonator
This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...
Main Authors: | , , , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | http://irep.iium.edu.my/36871/ http://irep.iium.edu.my/36871/ http://irep.iium.edu.my/36871/1/06717939.pdf |
Summary: | This paper presents use of the simple cantilever
beam as RF CMOS-MEMS resonator, which can be scaled like
transistor with improved performance. This resonator can be
used in the oscillator and filter part of RF transceiver, which can
actually be fabricated on chip without losing its Q-factor. The
cantilever beam resonator was designed using COMSOL4.3b™
and produce resonance frequency at 10.2MHz, pull-in voltage at
1.5V and Q of 10000. |
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