RF CMOS-MEMS cantilever resonator

RF CMOS-MEMS cantilever resonator

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...

Full description

Bibliographic Details
Main Authors: Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Taufik, Mohamad Syamsi, Pandian, Mohanraj, Khan, Sheroz
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/1/06717939.pdf
id iium-36871
recordtype eprints
spelling iium-368712016-06-05T07:22:36Z http://irep.iium.edu.my/36871/ RF CMOS-MEMS cantilever resonator Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000. 2013-11 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/36871/1/06717939.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Taufik, Mohamad Syamsi and Pandian, Mohanraj and Khan, Sheroz (2013) RF CMOS-MEMS cantilever resonator. In: 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 26-27 Nov 2013, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
RF CMOS-MEMS cantilever resonator
description This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.
format Conference or Workshop Item
author Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_facet Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_sort Zainuddin, Ahmad Anwar
title RF CMOS-MEMS cantilever resonator
title_short RF CMOS-MEMS cantilever resonator
title_full RF CMOS-MEMS cantilever resonator
title_fullStr RF CMOS-MEMS cantilever resonator
title_full_unstemmed RF CMOS-MEMS cantilever resonator
title_sort rf cmos-mems cantilever resonator
publishDate 2013
url http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/1/06717939.pdf
first_indexed 2023-09-18T20:52:53Z
last_indexed 2023-09-18T20:52:53Z
_version_ 1777410111602425856

Similar Items