Simulations of surface and bulk acoustic wave MEMS biosensors

Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed...

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Main Authors:	Jamil, Nadira, Nordin, Anis Nurashikin, Voiculescu, Ioana, Mel, Maizirwan
Format:	Conference or Workshop Item
Language:	English
Published:	2010
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3711/ http://irep.iium.edu.my/3711/ http://irep.iium.edu.my/3711/1/11.pdf

id	iium-3711
recordtype	eprints
spelling	iium-37112011-09-22T01:18:25Z http://irep.iium.edu.my/3711/ Simulations of surface and bulk acoustic wave MEMS biosensors Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Mel, Maizirwan TK7885 Computer engineering Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed using a lithium niobate substrate with Al electrodes while the BAW resonator is formed using quartz substrate with gold electrodes. Finite element simulations of a 290 MHz SAW and a 220 MHz BAW resonator were performed using COMSOL Multiphysics #x2122;. Both models were simulated to determine their resonance frequency and frequency shift due to the loading of DF-1 animal cells, a biological material. The structure of the SAW device allows an additional transient simulation, which provides information regarding the acoustic wave propagation delay due to the presence of the cells. From the simulations it was observed that the SAW device yielded 2.8 MHz frequency shift ( #x0394;f) due to the cells while the BAW device provided #x0394;f of 2.7 MHz. The propagation delay in the SAW resonator due to the cells was simulated to be 3.5 ns. 2010-05 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/3711/1/11.pdf Jamil, Nadira and Nordin, Anis Nurashikin and Voiculescu, Ioana and Mel, Maizirwan (2010) Simulations of surface and bulk acoustic wave MEMS biosensors. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 5-7 May 2010, Seville, Spain. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486462&tag=1
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Mel, Maizirwan Simulations of surface and bulk acoustic wave MEMS biosensors
description	Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed using a lithium niobate substrate with Al electrodes while the BAW resonator is formed using quartz substrate with gold electrodes. Finite element simulations of a 290 MHz SAW and a 220 MHz BAW resonator were performed using COMSOL Multiphysics #x2122;. Both models were simulated to determine their resonance frequency and frequency shift due to the loading of DF-1 animal cells, a biological material. The structure of the SAW device allows an additional transient simulation, which provides information regarding the acoustic wave propagation delay due to the presence of the cells. From the simulations it was observed that the SAW device yielded 2.8 MHz frequency shift ( #x0394;f) due to the cells while the BAW device provided #x0394;f of 2.7 MHz. The propagation delay in the SAW resonator due to the cells was simulated to be 3.5 ns.
format	Conference or Workshop Item
author	Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Mel, Maizirwan
author_facet	Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Mel, Maizirwan
author_sort	Jamil, Nadira
title	Simulations of surface and bulk acoustic wave MEMS biosensors
title_short	Simulations of surface and bulk acoustic wave MEMS biosensors
title_full	Simulations of surface and bulk acoustic wave MEMS biosensors
title_fullStr	Simulations of surface and bulk acoustic wave MEMS biosensors
title_full_unstemmed	Simulations of surface and bulk acoustic wave MEMS biosensors
title_sort	simulations of surface and bulk acoustic wave mems biosensors
publishDate	2010
url	http://irep.iium.edu.my/3711/ http://irep.iium.edu.my/3711/ http://irep.iium.edu.my/3711/1/11.pdf
first_indexed	2023-09-18T20:11:39Z
last_indexed	2023-09-18T20:11:39Z
_version_	1777407517472587776

Simulations of surface and bulk acoustic wave MEMS biosensors

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