Novel MEMS fully differential capacitive transducer design and analysis

This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a...

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Main Authors:	Ya, Ma Li, Khan, Sheroz, Nordin, Anis Nurashikin, Al-Khateeb, Khalid A. Saeed, Islam, Md. Rafiqul, Naji, Ahmed Wathik
Format:	Conference or Workshop Item
Language:	English
Published:	2011
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3731/ http://irep.iium.edu.my/3731/ http://irep.iium.edu.my/3731/1/28.pdf

id	iium-3731
recordtype	eprints
spelling	iium-37312017-08-18T03:16:31Z http://irep.iium.edu.my/3731/ Novel MEMS fully differential capacitive transducer design and analysis Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik TK7885 Computer engineering This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change. 2011-05 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/3731/1/28.pdf Ya, Ma Li and Khan, Sheroz and Nordin, Anis Nurashikin and Al-Khateeb, Khalid A. Saeed and Islam, Md. Rafiqul and Naji, Ahmed Wathik (2011) Novel MEMS fully differential capacitive transducer design and analysis. In: 2011 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937152&tag=1
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik Novel MEMS fully differential capacitive transducer design and analysis
description	This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.
format	Conference or Workshop Item
author	Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik
author_facet	Ya, Ma Li Khan, Sheroz Nordin, Anis Nurashikin Al-Khateeb, Khalid A. Saeed Islam, Md. Rafiqul Naji, Ahmed Wathik
author_sort	Ya, Ma Li
title	Novel MEMS fully differential capacitive transducer design and analysis
title_short	Novel MEMS fully differential capacitive transducer design and analysis
title_full	Novel MEMS fully differential capacitive transducer design and analysis
title_fullStr	Novel MEMS fully differential capacitive transducer design and analysis
title_full_unstemmed	Novel MEMS fully differential capacitive transducer design and analysis
title_sort	novel mems fully differential capacitive transducer design and analysis
publishDate	2011
url	http://irep.iium.edu.my/3731/ http://irep.iium.edu.my/3731/ http://irep.iium.edu.my/3731/1/28.pdf
first_indexed	2023-09-18T20:11:40Z
last_indexed	2023-09-18T20:11:40Z
_version_	1777407519232098304

Novel MEMS fully differential capacitive transducer design and analysis

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