Improving μ-wire electro-discharge machining operation of polished silicon wafer by conductive coating
Micro-Wire Electro-discharge machining (-WEDM) is a nonconventional machining technology which is extensively used for metal based micro fabrication process. This is a non-contact machining process where material removal is taken place by electro-thermal action. -WEDM process is difficult to be...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/37351/ http://irep.iium.edu.my/37351/ http://irep.iium.edu.my/37351/1/ICOMM_2014_aous.pdf http://irep.iium.edu.my/37351/2/ICOMM_2014_proof.pdf |