Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates

Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD)...

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Main Authors:	Nur Sa’adah, Muhamad Sauki, Herman, Sukreen Hana, Ani, Mohd Hanafi, Mohamad Rusop , Mahmood
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2013
Subjects:	TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction
Online Access:	http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/1/Electrical_properties_dependence_on_substrate_temperature_of_sputtered_ZnO_nanoparticles_thin_films_on_teflon_substrates.pdf

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spelling	iium-375972016-12-22T07:13:18Z http://irep.iium.edu.my/37597/ Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates Nur Sa’adah, Muhamad Sauki Herman, Sukreen Hana Ani, Mohd Hanafi Mohamad Rusop , Mahmood TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD) It was found that the electrical conductivity and resistivity of the ZnO thin film deposited at 40oC was the highest and lowest intensity accordingly. This was supported by the crystalline quality of the films from the x-ray diffraction (XRD) results. The XRD pattern showed that the ZnO thin film deposited at 40oC has the highest intensity with the narrowest full-width-athalf- maximum indicating that the film has the highest quality compared to other thin film. Trans Tech Publications, Switzerland 2013 Article PeerReviewed application/pdf en http://irep.iium.edu.my/37597/1/Electrical_properties_dependence_on_substrate_temperature_of_sputtered_ZnO_nanoparticles_thin_films_on_teflon_substrates.pdf Nur Sa’adah, Muhamad Sauki and Herman, Sukreen Hana and Ani, Mohd Hanafi and Mohamad Rusop , Mahmood (2013) Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates. Advanced Materials Research, 795. pp. 403-406. ISSN 1022-6680 http://www.scientific.net 10.4028/www.scientific.net/AMR.795.403
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction
spellingShingle	TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction Nur Sa’adah, Muhamad Sauki Herman, Sukreen Hana Ani, Mohd Hanafi Mohamad Rusop , Mahmood Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
description	Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD) It was found that the electrical conductivity and resistivity of the ZnO thin film deposited at 40oC was the highest and lowest intensity accordingly. This was supported by the crystalline quality of the films from the x-ray diffraction (XRD) results. The XRD pattern showed that the ZnO thin film deposited at 40oC has the highest intensity with the narrowest full-width-athalf- maximum indicating that the film has the highest quality compared to other thin film.
format	Article
author	Nur Sa’adah, Muhamad Sauki Herman, Sukreen Hana Ani, Mohd Hanafi Mohamad Rusop , Mahmood
author_facet	Nur Sa’adah, Muhamad Sauki Herman, Sukreen Hana Ani, Mohd Hanafi Mohamad Rusop , Mahmood
author_sort	Nur Sa’adah, Muhamad Sauki
title	Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
title_short	Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
title_full	Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
title_fullStr	Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
title_full_unstemmed	Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates
title_sort	electrical properties dependence on substrate temperature of sputtered zno nanoparticles thin films on teflon substrates
publisher	Trans Tech Publications, Switzerland
publishDate	2013
url	http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/1/Electrical_properties_dependence_on_substrate_temperature_of_sputtered_ZnO_nanoparticles_thin_films_on_teflon_substrates.pdf
first_indexed	2023-09-18T20:53:56Z
last_indexed	2023-09-18T20:53:56Z
_version_	1777410177923809280

Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates

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