Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS

In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the micr...

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Main Authors:	Zakaria, Mohd Hazrul, Bais, Badariah, Ab. Rahim, Rosminazuin, Yeop Majlis, Burhanuddin
Format:	Conference or Workshop Item
Language:	English
Published:	2012
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf

id	iium-38793
recordtype	eprints
spelling	iium-387932014-10-16T07:06:26Z http://irep.iium.edu.my/38793/ Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS Zakaria, Mohd Hazrul Bais, Badariah Ab. Rahim, Rosminazuin Yeop Majlis, Burhanuddin T Technology (General) In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the microcantilever namely the thickness, length, width and the distance between the piezoresistor legs. The sensitivity of the microcantilever was then calculated and tabulated. From the simulation results, it can be shown that the displacement and sensitivity of the single layer piezoresistive microcantilever is comparable to the dual layer counterpart with the thinner microcantilever resulted in a maximum displacement and sensitivity, compared to other geometrical factors. 2012 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf Zakaria, Mohd Hazrul and Bais, Badariah and Ab. Rahim, Rosminazuin and Yeop Majlis, Burhanuddin (2012) Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS. In: 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012, 19-21 September 2012, Kuala Lumpur. http://ieeeexplore.com/xpl/articleDetails.jsp?tp=&arnumber=6417154&searchWithin%3Dp_Authors%3A.QT.Bais%2C+B..QT.
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	T Technology (General)
spellingShingle	T Technology (General) Zakaria, Mohd Hazrul Bais, Badariah Ab. Rahim, Rosminazuin Yeop Majlis, Burhanuddin Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
description	In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the microcantilever namely the thickness, length, width and the distance between the piezoresistor legs. The sensitivity of the microcantilever was then calculated and tabulated. From the simulation results, it can be shown that the displacement and sensitivity of the single layer piezoresistive microcantilever is comparable to the dual layer counterpart with the thinner microcantilever resulted in a maximum displacement and sensitivity, compared to other geometrical factors.
format	Conference or Workshop Item
author	Zakaria, Mohd Hazrul Bais, Badariah Ab. Rahim, Rosminazuin Yeop Majlis, Burhanuddin
author_facet	Zakaria, Mohd Hazrul Bais, Badariah Ab. Rahim, Rosminazuin Yeop Majlis, Burhanuddin
author_sort	Zakaria, Mohd Hazrul
title	Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
title_short	Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
title_full	Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
title_fullStr	Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
title_full_unstemmed	Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
title_sort	geometrical characterization of single layer silicon based piezoresistive microcantilever using ansys
publishDate	2012
url	http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf
first_indexed	2023-09-18T20:55:44Z
last_indexed	2023-09-18T20:55:44Z
_version_	1777410291631390720

Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS

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