Analysis of electrical responses of MEMS piezoresistive microcantilever
In this paper, an optimization of mechanical and electrical performance of single-layer silicon piezoresistive microcantilever (PRM) sensor in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon was discussed. Using CoventorWare 2008, t...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39191/ http://irep.iium.edu.my/39191/ http://irep.iium.edu.my/39191/1/39191.pdf http://irep.iium.edu.my/39191/4/39191_Analysis%20of%20electrical%20responses%20of%20MEMS_Scopus.pdf |