Performance analysis of zinc oxide piezoelectric MEMS energy harvester

This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate inf...

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Main Authors:	Jamain, Umi Milhana, Ibrahim, Nur Hidayah, Ab Rahim, Rosminazuin
Format:	Conference or Workshop Item
Language:	English English
Published:	2014
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf

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recordtype	eprints
spelling	iium-395982017-09-26T08:49:09Z http://irep.iium.edu.my/39598/ Performance analysis of zinc oxide piezoelectric MEMS energy harvester Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin T Technology (General) This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied. 2014 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/39598/1/icse2014_published.pdf application/pdf en http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf Jamain, Umi Milhana and Ibrahim, Nur Hidayah and Ab Rahim, Rosminazuin (2014) Performance analysis of zinc oxide piezoelectric MEMS energy harvester. In: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, 27th-29th Aug 2014, Kuala Lumpur. http://ieeexplore.ieee.org
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	T Technology (General)
spellingShingle	T Technology (General) Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin Performance analysis of zinc oxide piezoelectric MEMS energy harvester
description	This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied.
format	Conference or Workshop Item
author	Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin
author_facet	Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin
author_sort	Jamain, Umi Milhana
title	Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_short	Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_full	Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_fullStr	Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_full_unstemmed	Performance analysis of zinc oxide piezoelectric MEMS energy harvester
title_sort	performance analysis of zinc oxide piezoelectric mems energy harvester
publishDate	2014
url	http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf
first_indexed	2023-09-18T20:56:55Z
last_indexed	2023-09-18T20:56:55Z
_version_	1777410365358866432

Performance analysis of zinc oxide piezoelectric MEMS energy harvester

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