Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application
Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for cre...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/40692/ http://irep.iium.edu.my/40692/ http://irep.iium.edu.my/40692/ http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf |