Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Asian Research Publishing Network (ARPN)
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/1/journal_ARPN_published.pdf |