Application of VACNTs in MEMS devices

Vertically aligned Carbon Nanotubes (CNTs) which are commonly referred to as CNT forests, have many potential engineering applications for its attractive mechanical, electrical, optical, and thermal properties. Various micro patterning of VACNTs are used for fabricating MEMS devices such as pressure...

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Main Authors: MRazib, MAsyraf, Rana, M. M., Hassan, M. A., Saleh, Tanveer
Format: Conference or Workshop Item
Language:English
English
English
Published: 2015
Subjects:
Online Access:http://irep.iium.edu.my/46212/
http://irep.iium.edu.my/46212/
http://irep.iium.edu.my/46212/1/Application_of_VACNTs_in_MEMS_devices.pdf
http://irep.iium.edu.my/46212/2/Acceptance_letter.pdf
http://irep.iium.edu.my/46212/3/Speakers_-_World_Congress_on_Microscopy__Instrumentation%2C_Techniques_and_Applications_in_Life_Sciences_and_Materials_Sciences%28WCM_2015%29___.pdf
id iium-46212
recordtype eprints
spelling iium-462122015-12-07T08:30:46Z http://irep.iium.edu.my/46212/ Application of VACNTs in MEMS devices MRazib, MAsyraf Rana, M. M. Hassan, M. A. Saleh, Tanveer T Technology (General) Vertically aligned Carbon Nanotubes (CNTs) which are commonly referred to as CNT forests, have many potential engineering applications for its attractive mechanical, electrical, optical, and thermal properties. Various micro patterning of VACNTs are used for fabricating MEMS devices such as pressure sensor, thermometer, switches etc. A new patterning technique recently introduced by our group is named as micro mechanical bending (M2B) of VACNTs. Typically, CNT forest is known to be the darkest material on earth that can almost completely absorb light. This new M2B technique for CNT forest remarkably changes the optical property of the processed zone. The most significant observation made from the processed CNT forest is the visible optical reflection from bent and flattened area. Another interesting property of the resultant is anisotropic behaviour of the surface. The anisotropic and flexible nature of CNT forest has opened the gateway to use these patterned CNT forest as several types of MEMS based sensor, which will be discussed in this paper. 2015 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/46212/1/Application_of_VACNTs_in_MEMS_devices.pdf application/pdf en http://irep.iium.edu.my/46212/2/Acceptance_letter.pdf application/pdf en http://irep.iium.edu.my/46212/3/Speakers_-_World_Congress_on_Microscopy__Instrumentation%2C_Techniques_and_Applications_in_Life_Sciences_and_Materials_Sciences%28WCM_2015%29___.pdf MRazib, MAsyraf and Rana, M. M. and Hassan, M. A. and Saleh, Tanveer (2015) Application of VACNTs in MEMS devices. In: World Congress on Microscopy: Instrumentation, Techniques and Applications in Life Sciences and Materials Sciences (WCM 2015) , 9-11 October 2015 , Mahatma Gandhi University, Kottayam, Kerala, India. (Unpublished) http://www.microscopy.macromol.in/
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
English
English
topic T Technology (General)
spellingShingle T Technology (General)
MRazib, MAsyraf
Rana, M. M.
Hassan, M. A.
Saleh, Tanveer
Application of VACNTs in MEMS devices
description Vertically aligned Carbon Nanotubes (CNTs) which are commonly referred to as CNT forests, have many potential engineering applications for its attractive mechanical, electrical, optical, and thermal properties. Various micro patterning of VACNTs are used for fabricating MEMS devices such as pressure sensor, thermometer, switches etc. A new patterning technique recently introduced by our group is named as micro mechanical bending (M2B) of VACNTs. Typically, CNT forest is known to be the darkest material on earth that can almost completely absorb light. This new M2B technique for CNT forest remarkably changes the optical property of the processed zone. The most significant observation made from the processed CNT forest is the visible optical reflection from bent and flattened area. Another interesting property of the resultant is anisotropic behaviour of the surface. The anisotropic and flexible nature of CNT forest has opened the gateway to use these patterned CNT forest as several types of MEMS based sensor, which will be discussed in this paper.
format Conference or Workshop Item
author MRazib, MAsyraf
Rana, M. M.
Hassan, M. A.
Saleh, Tanveer
author_facet MRazib, MAsyraf
Rana, M. M.
Hassan, M. A.
Saleh, Tanveer
author_sort MRazib, MAsyraf
title Application of VACNTs in MEMS devices
title_short Application of VACNTs in MEMS devices
title_full Application of VACNTs in MEMS devices
title_fullStr Application of VACNTs in MEMS devices
title_full_unstemmed Application of VACNTs in MEMS devices
title_sort application of vacnts in mems devices
publishDate 2015
url http://irep.iium.edu.my/46212/
http://irep.iium.edu.my/46212/
http://irep.iium.edu.my/46212/1/Application_of_VACNTs_in_MEMS_devices.pdf
http://irep.iium.edu.my/46212/2/Acceptance_letter.pdf
http://irep.iium.edu.my/46212/3/Speakers_-_World_Congress_on_Microscopy__Instrumentation%2C_Techniques_and_Applications_in_Life_Sciences_and_Materials_Sciences%28WCM_2015%29___.pdf
first_indexed 2023-09-18T21:05:47Z
last_indexed 2023-09-18T21:05:47Z
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