Design and simulation of MEMS helmholtz resonator for acoustic energy harvester
An acoustic energy harvester using Helmholtz resonator with piezoelectric circular diaphragm has been studied using COMSOL Multiphysics 5.1. In this paper, multiple designs considerations for MEMS Helmholtz resonator and piezoelectric circular diaphragm including the length and radius of the tu...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
IEEE
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/1/54518.pdf http://irep.iium.edu.my/54518/2/54518_Design%20and%20Simulation%20of%20MEMS%20Helmholtz%20Resonator%20for%20Acoustic%20Energy%20Harvester_SCOPUS.pdf |