Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology

Micromechanical bending (M2B) is a newly developed micro patterning technique applied for vertically aligned carbon nanotubes (VACNTs) array, commonly known as CNT forest. This process is required to realize the various use of CNT forest in Micro-Electromechanical Systems (MEMS). There are variou...

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Main Authors:	Rana, M. Masud, Saleh, Tanveer, Mohd Asyraf, Mohd Razib, Muthalif, Asan G. A.
Format:	Article
Language:	English English English
Published:	Taylor & Francis 2017
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/1/Published%20Version.pdf http://irep.iium.edu.my/57542/7/57542-Empirical%20modeling%20of%20micromechanical%20bending%20process_SCOPUS.pdf http://irep.iium.edu.my/57542/13/57542_Empirical%20modeling%20of%20micromechanical%20bending_WOS.pdf

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recordtype	eprints
spelling	iium-575422018-04-20T05:29:19Z http://irep.iium.edu.my/57542/ Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology Rana, M. Masud Saleh, Tanveer Mohd Asyraf, Mohd Razib Muthalif, Asan G. A. T Technology (General) Micromechanical bending (M2B) is a newly developed micro patterning technique applied for vertically aligned carbon nanotubes (VACNTs) array, commonly known as CNT forest. This process is required to realize the various use of CNT forest in Micro-Electromechanical Systems (MEMS). There are various parameters involved in M2B process that controls the surface roughness of the processed structure of the CNT forest. However, there is no mathematical model available, yet that could predict the influence of these parameters on the surface roughness of the patterned CNT forest. In this paper, an empirical approach has been used to predict the surface roughness for the micromechanical bending (M2B) processed CNT forest. At first, several experiments were conducted by varying different process parameters such as tool rotational speed, lateral speed and a step size of the bend. Best optimized process parameters were identified at 2,000 rpm tool rotational speed, 1 mm/ min lateral speed and 1 μm step size that produced a minimum surface roughness of Ra = 15 nm. Finally, a response surface methodology (RSM) based mathematical model was developed and validated with reasonable accuracy to understand the impact of different parameters on the M2B process. Taylor & Francis 2017-06-27 Article PeerReviewed application/pdf en http://irep.iium.edu.my/57542/1/Published%20Version.pdf application/pdf en http://irep.iium.edu.my/57542/7/57542-Empirical%20modeling%20of%20micromechanical%20bending%20process_SCOPUS.pdf application/pdf en http://irep.iium.edu.my/57542/13/57542_Empirical%20modeling%20of%20micromechanical%20bending_WOS.pdf Rana, M. Masud and Saleh, Tanveer and Mohd Asyraf, Mohd Razib and Muthalif, Asan G. A. (2017) Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology. Cogent Engineering, 4 (1). pp. 1-13. ISSN 2331-1916 http://www.tandfonline.com/doi/full/10.1080/23311916.2017.1347078 10.1080/23311916.2017.1347078
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English English
topic	T Technology (General)
spellingShingle	T Technology (General) Rana, M. Masud Saleh, Tanveer Mohd Asyraf, Mohd Razib Muthalif, Asan G. A. Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
description	Micromechanical bending (M2B) is a newly developed micro patterning technique applied for vertically aligned carbon nanotubes (VACNTs) array, commonly known as CNT forest. This process is required to realize the various use of CNT forest in Micro-Electromechanical Systems (MEMS). There are various parameters involved in M2B process that controls the surface roughness of the processed structure of the CNT forest. However, there is no mathematical model available, yet that could predict the influence of these parameters on the surface roughness of the patterned CNT forest. In this paper, an empirical approach has been used to predict the surface roughness for the micromechanical bending (M2B) processed CNT forest. At first, several experiments were conducted by varying different process parameters such as tool rotational speed, lateral speed and a step size of the bend. Best optimized process parameters were identified at 2,000 rpm tool rotational speed, 1 mm/ min lateral speed and 1 μm step size that produced a minimum surface roughness of Ra = 15 nm. Finally, a response surface methodology (RSM) based mathematical model was developed and validated with reasonable accuracy to understand the impact of different parameters on the M2B process.
format	Article
author	Rana, M. Masud Saleh, Tanveer Mohd Asyraf, Mohd Razib Muthalif, Asan G. A.
author_facet	Rana, M. Masud Saleh, Tanveer Mohd Asyraf, Mohd Razib Muthalif, Asan G. A.
author_sort	Rana, M. Masud
title	Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
title_short	Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
title_full	Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
title_fullStr	Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
title_full_unstemmed	Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
title_sort	empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
publisher	Taylor & Francis
publishDate	2017
url	http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/1/Published%20Version.pdf http://irep.iium.edu.my/57542/7/57542-Empirical%20modeling%20of%20micromechanical%20bending%20process_SCOPUS.pdf http://irep.iium.edu.my/57542/13/57542_Empirical%20modeling%20of%20micromechanical%20bending_WOS.pdf
first_indexed	2023-09-18T21:21:21Z
last_indexed	2023-09-18T21:21:21Z
_version_	1777411902796726272

Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology

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