Empirical modeling of micromechanical bending process of vertically aligned carbon nanotube forest using response surface methodology
Micromechanical bending (M2B) is a newly developed micro patterning technique applied for vertically aligned carbon nanotubes (VACNTs) array, commonly known as CNT forest. This process is required to realize the various use of CNT forest in Micro-Electromechanical Systems (MEMS). There are variou...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English English English |
| Published: |
Taylor & Francis
2017
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/ http://irep.iium.edu.my/57542/1/Published%20Version.pdf http://irep.iium.edu.my/57542/7/57542-Empirical%20modeling%20of%20micromechanical%20bending%20process_SCOPUS.pdf http://irep.iium.edu.my/57542/13/57542_Empirical%20modeling%20of%20micromechanical%20bending_WOS.pdf |