Acoustic wave based MEMS devices, development and application
Acoustic waves based MEMS devices offer a promising technology platform for a wide range of applications due to their high sensitivity and the capability to operate wirelessly. These devices utilize acoustic waves propagating through or on the surface of a piezoelectric material. An acoustic wave de...
| Main Authors: | , |
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| Format: | Book Chapter |
| Language: | English |
| Published: |
InTech
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/6400/ http://irep.iium.edu.my/6400/ http://irep.iium.edu.my/6400/ http://irep.iium.edu.my/6400/1/Acoustic-wave-based-mems-devices--development-and-applications.pdf |