Synthesis and characterization of nanocrystalline silicon thin films on teflon substrates by RF magnetron sputtering / Norhidayatul Hikmee Mahzan
Studies on the growth of nanocrystalline silicon (nc-Si) on teflon substrate are being studied. The preparation was done by using direct deposition of Radiofrequency (RF) magnetron sputtering method. The physical and crystallinity of thin films was studied and investigated to focus on various deposi...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | http://ir.uitm.edu.my/id/eprint/18430/ http://ir.uitm.edu.my/id/eprint/18430/2/TM_NORHIDAYATUL%20HIKMEE%20MAHZAN%20EE%2015_5.pdf |