Growth conditions of graphene grown in chemical vapour deposition (CVD)

Growth conditions of graphene grown in chemical vapour deposition (CVD)

The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed s...

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Main Authors: Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia 2017
Online Access:http://journalarticle.ukm.my/11119/
http://journalarticle.ukm.my/11119/
http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf
id ukm-11119
recordtype eprints
spelling ukm-111192017-12-21T04:12:01Z http://journalarticle.ukm.my/11119/ Growth conditions of graphene grown in chemical vapour deposition (CVD) Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene. Penerbit Universiti Kebangsaan Malaysia 2017-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf Mohamad Shukri Sirat, and Edhuan Ismail, and Hadi Purwanto, and Mohd Asyadi Azam Mohd Abid, and Mohd Hanafi Ani, (2017) Growth conditions of graphene grown in chemical vapour deposition (CVD). Sains Malaysiana, 46 (7). pp. 1033-1038. ISSN 0126-6039 http://www.ukm.my/jsm/malay_journals/jilid46bil7_2017/KandunganJilid46Bil7_2017.html
repository_type Digital Repository
institution_category Local University
institution Universiti Kebangasaan Malaysia
building UKM Institutional Repository
collection Online Access
language English
description The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene.
format Article
author Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
spellingShingle Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
Growth conditions of graphene grown in chemical vapour deposition (CVD)
author_facet Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
author_sort Mohamad Shukri Sirat,
title Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_short Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_full Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_fullStr Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_full_unstemmed Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_sort growth conditions of graphene grown in chemical vapour deposition (cvd)
publisher Penerbit Universiti Kebangsaan Malaysia
publishDate 2017
url http://journalarticle.ukm.my/11119/
http://journalarticle.ukm.my/11119/
http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf
first_indexed 2023-09-18T19:59:26Z
last_indexed 2023-09-18T19:59:26Z
_version_ 1777406748963897344

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