Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH
This study is on the development of a new design method of silicon corrugated diaphragm using KOH anisotropic etching technique. Design rules for designing and fabricating corrugated silicon diaphragm structures were developed based on the application of the design rules for corrugated metal diaph...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2006
|
| Online Access: | http://journalarticle.ukm.my/1456/ http://journalarticle.ukm.my/1456/ http://journalarticle.ukm.my/1456/1/2006-15.pdf |
| id |
ukm-1456 |
|---|---|
| recordtype |
eprints |
| spelling |
ukm-14562016-12-14T06:29:31Z http://journalarticle.ukm.my/1456/ Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH Norhayati Soin, Burhanuddin Yeop Majlis, This study is on the development of a new design method of silicon corrugated diaphragm using KOH anisotropic etching technique. Design rules for designing and fabricating corrugated silicon diaphragm structures were developed based on the application of the design rules for corrugated metal diaphragm structures which is later being modified. The KOH etching process has been performed by using etching simulation tool of Intellisuite AnisE in order to realize the corrugated structures on the silicon wafer prior to the fabrication process. The disparity of the etching error percentage, De was found to be too small between the simulated and experimental results which are 0.15% 2006 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/1456/1/2006-15.pdf Norhayati Soin, and Burhanuddin Yeop Majlis, (2006) Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH. Jurnal Kejuruteraan, 18 . pp. 147-160. http://www.ukm.my/jkukm/index.php/jkukm |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
Universiti Kebangasaan Malaysia |
| building |
UKM Institutional Repository |
| collection |
Online Access |
| language |
English |
| description |
This study is on the development of a new design method of silicon corrugated diaphragm using KOH
anisotropic etching technique. Design rules for designing and fabricating corrugated silicon diaphragm
structures were developed based on the application of the design rules for corrugated metal diaphragm
structures which is later being modified. The KOH etching process has been performed by using etching
simulation tool of Intellisuite AnisE in order to realize the corrugated structures on the silicon wafer prior to
the fabrication process. The disparity of the etching error percentage, De was found to be too small between
the simulated and experimental results which are 0.15% |
| format |
Article |
| author |
Norhayati Soin, Burhanuddin Yeop Majlis, |
| spellingShingle |
Norhayati Soin, Burhanuddin Yeop Majlis, Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH |
| author_facet |
Norhayati Soin, Burhanuddin Yeop Majlis, |
| author_sort |
Norhayati Soin, |
| title |
Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik KOH |
| title_short |
Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik KOH |
| title_full |
Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik KOH |
| title_fullStr |
Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik KOH |
| title_full_unstemmed |
Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik KOH |
| title_sort |
pembangunan kaedah reka bentuk dan fabrikasi diafram beralun
silikon menggunakan teknik punaran anisotropik koh |
| publishDate |
2006 |
| url |
http://journalarticle.ukm.my/1456/ http://journalarticle.ukm.my/1456/ http://journalarticle.ukm.my/1456/1/2006-15.pdf |
| first_indexed |
2023-09-18T19:33:23Z |
| last_indexed |
2023-09-18T19:33:23Z |
| _version_ |
1777405110197944320 |