Optimization of titanium silicide formation on boron doped silicon using statistical design
The effects of first heat treatment temperature, second heat treatment temperature and second heat treatment time on titanium films by measuring the sheet resistance was investigated using statistical design of experiment. Two-level screening experiment with 23 factorial design was used to evaluate...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Universiti Kebangsaan Malaysia
2000
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| Online Access: | http://journalarticle.ukm.my/3790/ http://journalarticle.ukm.my/3790/ |